Product
Product ListAll
-
MDA-400LJ
- TypeFully manual
- Mask sizeup to 5 inch
- Substrate sizepiece to 4 inch circle
-
MDA-400M
- TypeFully manual
- Mask sizeup to 5 inch
- Substrate sizepiece to 4 inch circle
-
MDA-400M-6
- TypeFully manual
- Mask sizeup to 7 inch
- Substrate sizepiece to 6 inch circle
-
MDA-600LJ
- TypeFully manual
- Mask sizeup to 7 inch
- Substrate sizepiece to 6 inch circle
-
MDA-600S
- TypePC control semi auto
- Mask sizeup to 7 inch
- Substrate sizepiece to 6 inch circle
-
MDA-80MS
- TypePC control semi auto
- Mask sizeup to 9 inch
- Substrate sizepiece to 8 inch
-
MDA-80SA
- TypeJoystick control Semi-Auto
- Mask sizeup to 9 inch
- Substrate size6 ~ 8 inch
-
MDA-12SA
- TypeJoystick control Semi-Auto
- Mask sizeup to 14 inch
- Substrate size8 ~ 12 inch
-
MDA-20SA
- TypeJoystick control Semi-Auto
- Mask sizeUser spec.
- Substrate sizeUser spec. (Large area)
-
MDA-40FA
- TypeFull automatic
- Mask sizeup to 5 inch
- Substrate size2 ~ 4 inch
-
MDA-60FA
- TypeFull automatic
- Mask sizeup to 7 inch
- Substrate size4 ~ 6 inch
-
MDA-80FA
- TypeFull automatic
- Mask sizeup to 9 inch
- Substrate size6 ~ 8 inch
-
MDA-12FA
- TypeFull automatic
- Mask sizeup to 14 inch
- Substrate size8 ~ 12 inch
-
MDA-20FA
- TypeFull automatic
- Mask sizeUser spec.
- Substrate sizeUser spec.
-
MDE-200SC
- TypeScan & Step Exposure
- Mask sizeUser spec.
- Substrate sizeUser spec.
-
SPIN-1200T
- TypeSpin coater system
- Substrate sizepiece ~ up to 4 inch
- Spin speed300 ~ 7,000 rpm(@without load) an error of less than 3 % (overseas 10,000 rpm)
-
SPIN-1200D
- TypeSpin coater system
- Substrate sizepiece ~ up to 4 inch
- Spin speed300 ~ 7,000 rpm(@without load) an error of less than 3 %
-
SPIN-3000BD
- TypeSpin coater system
- Substrate sizepiece ~ up to 6 inch
- Spin speed300 ~ 7,000 rpm(@without load) an error of less than 3 %
-
SPIN-3000A
- TypeSpin coater system
- Substrate sizepiece ~ up to 8 inch
- Spin speed300 ~ 7,000 rpm(@without load) an error of less than 3 %
-
SPIN-4000A
- TypeSpin coater system
- Substrate size8 ~ 12 inch
- Spin speed300 ~ 5,000 rpm(@without load) an error of less than 3 %
-
SPIN-5000/7000A
- TypeSpin coater system
- Substrate sizeCustomized
- Spin speedCustomized
-
Nano Imprint Kit
- Substrate size4 inch
- Imprintable wafer area4 inch Maximum
- Mold substrate size5 x 0.09 inch
-
PL series
- Substrate sizePL 200 : 2 inch, PL 400 : 4 inch, PL 600 : 6 inch (smaller sizes, irregular shapes compatible)
- Imprint areaSame as wafer size
- Mold plate sizePL 200 : 2, 1 inch, PL 400 : 4, 3, 1 inch, PL 600 : 6, 4, 2, 1 inch
-
MLW 100
- Substrate sizeMin. 5 x 5 mm, max. 125 x 125 mm.
- Substrate thickness0 - 4 mm manual adjustment. 12 mm with the optional motorized Z-axis installed.
- Laser wavelength405 nm, GaN laser diode.
-
PicoMaster 100
- Substrate sizeMin. 5 x 5 mm, max. 125 x 125 mm.
- Substrate thickness0 - 4 mm manual adjustment. 12 mm with the optional motorized Z-axis installed.
- Laser wavelength405 nm, GaN laser diode.
-
PicoMaster 200
- Substrate sizeMin. 5 x 5 mm, max. 220 x 220 mm.
- Substrate thickness0 - 4 mm manual adjustment. 12 mm with the optional motorized Z-axis installed.
- Laser wavelength405 nm, GaN laser diode.
-
Minilab
- CompositionSpin Coater (SPIN-1200T), Hot plate, D.I water system
- Drain Line
- Drain tank
-
PicoMaster XF200
- FeatureParallel multi beam writing strategy
- FeatureEdge to edge exposure
- Write speed up to 250 mm² / min
-
UV LAMP
- Type350 W, 500 W, 1 kW, 2 kW, 5 kW